Assignee
LAVOIE ADRIEN
US·5 granted patents·1,149 citations·filing 2011–2013
Top patents by PatentIndex Score
5 records- 0199US8647993B2Methods for UV-assisted conformal film depositionLAVOIE ADRIEN·Filed 2012·Granted Feb 11, 2014·487 cites·18 claims
- 0297US9611544B2Plasma activated conformal dielectric film depositionLAVOIE ADRIEN·Filed 2011·Granted Apr 4, 2017·44 cites·44 claims
- 0397US8728956B2Plasma activated conformal film depositionLAVOIE ADRIEN·Filed 2011·Granted May 20, 2014·541 cites·39 claims
- 0495US8728955B2Method of plasma activated deposition of a conformal film on a substrate surfaceLAVOIE ADRIEN·Filed 2012·Granted May 20, 2014·70 cites·15 claims
- 0589US8993460B2Apparatuses and methods for depositing SiC/SiCN films via cross-metathesis reactions with organometallic co-reactantsLAVOIE ADRIEN·Filed 2013·Granted Mar 31, 2015·7 cites·25 claims
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