Inventor · disambiguated record
Stephen K. Loh
Also filed as: LOH STEPHEN K
6 granted patents·1 pending application·132 citations·filing 1997–2007
83Inventor score
Top patents by PatentIndex Score
7 records- 0176US6228701B1Apparatus and method for minimizing diffusion in stacked capacitors formed on silicon plugsSIEMENS AG·Filed 1997·Granted May 8, 2001·38 cites·40 claims
- 0276US5998253AMethod of forming a dopant outdiffusion control structure including selectively grown silicon nitride in a trench capacitor of a DRAM cellSIEMENS AG·Filed 1997·Granted Dec 7, 1999·40 cites·14 claims
- 0375US6057220ATitanium polycide stabilization with a porous barrierIBM·Filed 1997·Granted May 2, 2000·36 cites·11 claims
- 0456US6639264B1Method and structure for surface state passivation to improve yield and reliability of integrated circuit structuresIBM·Filed 1998·Granted Oct 28, 2003·18 cites·14 claims
- 0550US2007120259A1Detection of residual liner materials after polishing in damascene processFILIPPI RONALD G·Filed 2007·Application pending·0 cites
- 0644US7361584B2Detection of residual liner materials after polishing in damascene processIBM·Filed 2004·Granted Apr 22, 2008·0 cites·22 claims
- 0738US7101817B2System and method for determining line widths of free-standing structures resulting from a semiconductor manufacturing processIBM·Filed 2004·Granted Sep 5, 2006·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →