Inventor · disambiguated record
Takenobu Kobayashi
Also filed as: KOBAYASHI TAKENOBU
4 granted patents·1 pending application·2 citations·filing 2004–2010
59Inventor score
Top patents by PatentIndex Score
5 records- 0152US7668343B2Surface position measuring method and apparatusCANON KK·Filed 2009·Granted Feb 23, 2010·1 cites·12 claims
- 0243US7539328B2Surface position measuring method and apparatusCANON KK·Filed 2004·Granted May 26, 2009·1 cites·5 claims
- 0337US7663732B2Exposure apparatus, exposure method and device manufacturing method for compensating position measuring system using temperatureCANON KK·Filed 2006·Granted Feb 16, 2010·0 cites·6 claims
- 0433US8098363B2Exposure apparatus and method of manufacturing a deviceKOBAYASHI TAKENOBU·Filed 2008·Granted Jan 17, 2012·0 cites·4 claims
- 0529US2010261106A1Measurement apparatus, exposure apparatus, and device fabrication methodCANON KK·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →