Inventor · disambiguated record
Yasutaka Soma
Also filed as: SOMA YASUTAKA
2 granted patents·2 pending applications·7 citations·filing 2012–2017
45Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0183US10840213B2Bonding systemTOKYO ELECTRON LTD·Filed 2017·Granted Nov 17, 2020·7 cites·6 claims
- 0248US2014284000A1Separation apparatus, separation system, separation method and non-transitory computer readable storage mediumTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0344US9679798B2Substrate conveyance apparatus and substrate peeling systemTOKYO ELECTRON LTD·Filed 2014·Granted Jun 13, 2017·0 cites·10 claims
- 0444US2013000684A1Cleaning method and cleaning apparatusTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →