Inventor · disambiguated record
Hideaki Udou
Also filed as: UDOU HIDEAKI
2 granted patents·1 pending application·0 citations·filing 2016–2025
25Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0163US2025232988A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0259US12300518B2Substrate processing apparatus and substrate processing method having enhanced configuration of replenishing processing liquidTOKYO ELECTRON LTD·Filed 2022·Granted May 13, 2025·0 cites·8 claims
- 0341US9865452B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jan 9, 2018·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →