Inventor · disambiguated record
Yoshitaka Saita
Also filed as: SAITA YOSHITAKA
2 granted patents·2 pending applications·2 citations·filing 2003–2009
39Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0144US8778205B2Processing method and processing systemOHNO TSUYOSHI·Filed 2009·Granted Jul 15, 2014·0 cites·2 claims
- 0244US6972264B2Method and apparatus for etching SiTOKYO ELECTRON LTD·Filed 2003·Granted Dec 6, 2005·2 cites·6 claims
- 0342US2006021704A1Method and apparatus for etching SiTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 0437US2004260420A1Processing method and processing systemTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →