Inventor · disambiguated record
Thirumal Thanigaivelan
Also filed as: THANIGAIVELAN THIRUMAL
2 granted patents·1 pending application·25 citations·filing 2008–2010
58Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT3
Top patents by PatentIndex Score
3 records- 0187US7767583B2Method to improve uniformity of chemical mechanical polishing planarizationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Aug 3, 2010·23 cites·15 claims
- 0267US8012843B2Optimized halo or pocket cold implantsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Granted Sep 6, 2011·2 cites·19 claims
- 0335US2011034014A1Cold implant for optimized silicide formationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →