Inventor · disambiguated record
M'Hamed Akhssay
Also filed as: AKHSSAY M HAMED
8 granted patents·96 citations·filing 2003–2013
86Inventor score
Top patents by PatentIndex Score
8 records- 0190US7626684B2Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatusASML NETHERLANDS BV·Filed 2008·Granted Dec 1, 2009·14 cites·23 claims
- 0288US7262831B2Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Aug 28, 2007·38 cites·20 claims
- 0384US7403264B2Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatusASML NETHERLANDS BV·Filed 2004·Granted Jul 22, 2008·24 cites·12 claims
- 0475US9965578B2Compensation for patterning device deformationASML NETHERLANDS BV·Filed 2013·Granted May 8, 2018·4 cites·20 claims
- 0572US7829249B2Device manufacturing method, computer program and lithographic apparatusASML NETHERLANDS BV·Filed 2007·Granted Nov 9, 2010·4 cites·19 claims
- 0666US8810773B2Lithographic method and apparatusAKHSSAY M HAMED·Filed 2010·Granted Aug 19, 2014·2 cites·20 claims
- 0766US8068212B2Lithographic apparatus configured to compensate for variations in a critical dimension of projected features due to heating of optical elementsVAN DE KERKHOF MARCUS ADRIANUS·Filed 2010·Granted Nov 29, 2011·2 cites·15 claims
- 0862US7084952B2Lithographic apparatus, device manufacturing method, and computer-readable storage mediumASML NETHERLANDS BV·Filed 2003·Granted Aug 1, 2006·8 cites·38 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →