Inventor · disambiguated record
Johannes Christiaan Leonardus Franken
Also filed as: FRANKEN JOHANNES CHRISTIAAN LE · FRANKEN JOHANNES CHRISTIAAN LEONARDU · FRANKEN JOHANNES CHRISTIAAN LEONARDUS
16 granted patents·3 pending applications·58 citations·filing 2004–2024
91Inventor score
Top patents by PatentIndex Score
19 records- 0192US7868304B2Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted Jan 11, 2011·17 cites·30 claims
- 0281US7541603B2Radiation system and lithographic apparatus comprising the sameASML NETHERLANDS BV·Filed 2006·Granted Jun 2, 2009·6 cites·17 claims
- 0381US7462841B2Lithographic apparatus, device manufacturing method, and use of a radiation collectorASML NETHERLANDS BV·Filed 2005·Granted Dec 9, 2008·9 cites·51 claims
- 0479US2024369920A1Method of manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0572US8736806B2Lithographic apparatus, a radiation system, a device manufacturing method and a radiation generating methodFRIJNS OLAV WALDEMAR VLADIMIR·Filed 2009·Granted May 27, 2014·4 cites·12 claims
- 0670US7897941B2Lithographic apparatus, device manufacturing method, and use of a radiation collectorASML NETHERLANDS BV·Filed 2008·Granted Mar 1, 2011·2 cites·20 claims
- 0768US7501642B2Radiation sourceASML NETHERLANDS BV·Filed 2005·Granted Mar 10, 2009·7 cites·21 claims
- 0865US9753383B2Radiation source and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Sep 5, 2017·2 cites·14 claims
- 0965US7889312B2Apparatus comprising a rotating contaminant trapASML NETHERLANDS BV·Filed 2006·Granted Feb 15, 2011·2 cites·20 claims
- 1062US10394141B2Radiation source and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Aug 27, 2019·1 cites·20 claims
- 1162US7098994B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Aug 29, 2006·7 cites·29 claims
- 1261US12072620B2Method of manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2019·Granted Aug 27, 2024·0 cites·20 claims
- 1359US9753372B2Radiation source for an EUV optical lithographic apparatus, and lithographic apparatus comprising such a radiation sourceASML NETHERLANDS BV·Filed 2014·Granted Sep 5, 2017·1 cites·20 claims
- 1458US7863591B2Radiation system and lithographic apparatus comprising the sameASML NETHERLANDS BV·Filed 2009·Granted Jan 4, 2011·0 cites·12 claims
- 1549US7724349B2Device arranged to measure a quantity relating to radiation and lithographic apparatusASML NETHERLANDS BV·Filed 2007·Granted May 25, 2010·0 cites·19 claims
- 1649US2011096308A1Apparatus comprising a rotating contaminant trapASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
- 1747US7843548B2Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit systemASML NETHERLANDS BV·Filed 2007·Granted Nov 30, 2010·0 cites·19 claims
- 1844US8976332B2Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit systemVAN DEN HEUVEL MARTINUS WILHELMUS·Filed 2010·Granted Mar 10, 2015·0 cites·20 claims
- 1943US2016041374A1Radiation Collector, Radiation Source and Lithographic ApparatusASML NETHERLANDS BV·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →