Inventor · disambiguated record
Seng Hyun Chung
Also filed as: CHUNG SENG-HYUN
1 granted patent·2 pending applications·15 citations·filing 2006–2014
36Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0182US8888950B2Apparatus for plasma processing and method for plasma processingLEE KYUNG HO·Filed 2008·Granted Nov 18, 2014·15 cites·9 claims
- 0227US2014370715A1Plasma processing method and substrate processing apparatusWINTEL CO LTD·Filed 2014·Application pending·0 cites
- 0326US2007109714A1Embossing chuck enabling wafer to be easily detached therefromSOSUL INDUSTRY CO LTD·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →