Inventor · disambiguated record
Yasushi Fukasawa
Also filed as: FUKASAWA YASUSHI
2 granted patents·3 pending applications·23 citations·filing 2005–2012
59Inventor score
Top patents by PatentIndex Score
5 records- 0189US7718004B2Gas-introducing system and plasma CVD apparatusASM JAPAN·Filed 2005·Granted May 18, 2010·16 cites·20 claims
- 0280US8021723B2Method of plasma treatment using amplitude-modulated RF powerASM JAPAN·Filed 2007·Granted Sep 20, 2011·7 cites·24 claims
- 0351US2007266945A1Plasma cvd apparatus equipped with plasma blocking insulation plateASM JAPAN·Filed 2007·Application pending·0 cites
- 0441US2009056627A1Method and apparatus for monitoring plasma-induced damage using dc floating potential of substrateASM JAPAN·Filed 2007·Application pending·0 cites
- 0537US2014116335A1UV Irradiation Apparatus with Cleaning Mechanism and Method for Cleaning UV Irradiation ApparatusASM IP HOLDING BV·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →