Inventor · disambiguated record
Seong-Sue Kim
Also filed as: KIM SEONG-SUE
43 granted patents·7 pending applications·119 citations·filing 1998–2021
97Inventor score
Top patents by PatentIndex Score
50 records- 0196US7301884B2Method of and apparatus for recording data on optical recording mediumSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Nov 27, 2007·42 cites·14 claims
- 0291US7821714B1Apparatus and method for measuring aerial image of EUV maskSAMSUNG ELECTRONICS CO LTD·Filed 2010·Granted Oct 26, 2010·15 cites·16 claims
- 0385US9588413B2Photomask, method of correcting error thereof, integrated circuit device manufactured by using the photomask, and method of manufacturing the integrated circuit deviceSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Mar 7, 2017·3 cites·18 claims
- 0484US10338477B2Lithography apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Jul 2, 2019·2 cites·19 claims
- 0583US8335038B2Apparatus for measuring aerial image of EUV maskLEE DONG-GUN·Filed 2010·Granted Dec 18, 2012·3 cites·26 claims
- 0679US9025624B2Beam generatorLEE DONG-GUN·Filed 2012·Granted May 5, 2015·3 cites·11 claims
- 0779US7447129B2Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium therefor.SAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Nov 4, 2008·2 cites·12 claims
- 0879US7411880B2Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium thereforSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Aug 12, 2008·2 cites·11 claims
- 0978US7724628B2Method and apparatus for recording data on optical recording mediumSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted May 25, 2010·2 cites·4 claims
- 1078US7693023B2Method and apparatus for recording data on optical recording mediumSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Apr 6, 2010·2 cites·5 claims
- 1177US10915015B2EUV mask blank, photomask manufactured by using the EUV mask blank, lithography apparatus using the photomask and method of fabricating semiconductor device using the photomaskSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Feb 9, 2021·2 cites·20 claims
- 1277US8968969B2Reflective extreme ultraviolet mask and method of manufacturing the sameKIM TAE-GEUN·Filed 2011·Granted Mar 3, 2015·2 cites·9 claims
- 1377US7274647B2Method of and apparatus for recording data on optical recording mediumSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Sep 25, 2007·6 cites·13 claims
- 1475US9645484B2Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the sameKIM SEONG-SUE·Filed 2015·Granted May 9, 2017·2 cites·18 claims
- 1574US7807318B2Reflective photomask and method of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Oct 5, 2010·3 cites·20 claims
- 1670US9170480B2Reflective extreme ultraviolet mask and method of forming a pattern using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Oct 27, 2015·1 cites·14 claims
- 1769US8335039B2Method of measuring aerial image of EUV maskLEE DONG-GUN·Filed 2011·Granted Dec 18, 2012·1 cites·20 claims
- 1868US9465286B2Photomask, method of correcting error thereof, integrated circuit device manufactured by using the photomask, and method of manufacturing the integrated circuit deviceSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Oct 11, 2016·1 cites·31 claims
- 1968US8637840B2EUV projection lens and optic system having the sameLEE DONG-GUN·Filed 2010·Granted Jan 28, 2014·2 cites·21 claims
- 2068US7295505B2Method of and apparatus for recording data on optical recording mediumSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Nov 13, 2007·3 cites·18 claims
- 2166US8138483B2Method of measuring phase of phase shift maskLEE DONG-GUN·Filed 2009·Granted Mar 20, 2012·2 cites·8 claims
- 2263US7388824B2Method of and apparatus for recording data on optical recording mediumSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Jun 17, 2008·2 cites·21 claims
- 2363US7280460B2Method of and apparatus for recording data on optical recording mediumSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Oct 9, 2007·2 cites·15 claims
- 2462US8416665B2Method of and apparatus for recording data on optical recording mediumAHN YONG-JIN·Filed 2008·Granted Apr 9, 2013·0 cites·19 claims
- 2561US7359301B2Method of and apparatus for recording data on an optical recording mediumSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Apr 15, 2008·4 cites·28 claims
- 2660US11372322B2EUV mask blank, photomask manufactured by using the EUV mask blank, lithography apparatus using the photomask and method of fabricating semiconductor device using the photomaskSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jun 28, 2022·0 cites·20 claims
- 2759US9176375B2Methods of reducing a registration error of a photomask, and related photomasks and methods of manufacturing an integrated circuitKIM SANG-HYUN·Filed 2014·Granted Nov 3, 2015·1 cites·20 claims
- 2859US7349306B2Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium thereforSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Mar 25, 2008·2 cites·8 claims
- 2959US6395366B1Phase change optical discSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted May 28, 2002·3 cites·23 claims
- 3058US8018817B2Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium thereforSAMSUNG ELECTRONICS CO LTD·Filed 2008·Granted Sep 13, 2011·0 cites·10 claims
- 3158US7336588B2Method of and apparatus for recording data on optical recording mediumSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Feb 26, 2008·1 cites·17 claims
- 3257US8779403B2Apparatus and method for generating extreme ultra violet radiationSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Jul 15, 2014·1 cites·15 claims
- 3355US8470500B2Reflective extreme ultraviolet maskLEE DONG-GUN·Filed 2011·Granted Jun 25, 2013·0 cites·7 claims
- 3455US7369470B2Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium thereforSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted May 6, 2008·1 cites·2 claims
- 3555US7342860B2Method and apparatus for recording data on optical recording mediumSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Mar 11, 2008·1 cites·8 claims
- 3653US9239516B2Method of manufacturing reflective extreme ultraviolet maskKIM TAE-GEUN·Filed 2015·Granted Jan 19, 2016·0 cites·11 claims
- 3750US2008036024A1Image sensors and methods of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2007·Application pending·0 cites
- 3849US8422760B2System for monitoring haze of a photomaskLEE DONG-GUN·Filed 2009·Granted Apr 16, 2013·0 cites·20 claims
- 3947US7525890B2Method of and apparatus for recording data on optical recording mediumSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Apr 28, 2009·0 cites·1 claims
- 4046US8119309B2Reflective photomask and method of fabricating, reflective illumination system and method of process using the sameLEE DONG-GUN·Filed 2010·Granted Feb 21, 2012·0 cites·19 claims
- 4146US7376064B2Method and apparatus for recording data on optical recording mediumSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted May 20, 2008·0 cites·12 claims
- 4244US2015131071A1Semiconductor device manufacturing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2014·Application pending·0 cites
- 4343US7173888B2Recording apparatus for and method of improving overwrite characteristicsSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Feb 6, 2007·0 cites·37 claims
- 4441US7095703B2Apparatus and method for recording markSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Aug 22, 2006·0 cites·19 claims
- 4541US2011240863A1Methods and apparatuses for measuring phase roughness in an extreme ultraviolet maskLEE DONG-GUN·Filed 2011·Application pending·0 cites
- 4641US2013056642A1Method and apparatus for measuring aerial image of euv maskLEE DONG-GUN·Filed 2012·Application pending·0 cites
- 4741US2013161543A1Zoneplate and mask pattern measuring device comprising the zoneplatePARK JONG-JU·Filed 2012·Application pending·0 cites
- 4841US2004190431A1Optical recording medium, method and apparatus for recording data thereonSAMSUNG ELECTRONICS CO LTD·Filed 2004·Application pending·0 cites
- 4939US2014166906A1Extreme ultra violet generation deviceSAMSUNG ELECTRONICS CO LTD·Filed 2013·Application pending·0 cites
- 5030US6226251B1Signal detection method of a phase-change optical diskSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted May 1, 2001·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →