Inventor · disambiguated record
Tetsuya Sawahata
Also filed as: SAWAHATA TETSUYA
8 granted patents·101 citations·filing 1998–2019
86Inventor score
Top patents by PatentIndex Score
8 records- 0189US6555816B1Scanning electron microscope and sample observation method using the sameHITACHI LTD·Filed 2000·Granted Apr 29, 2003·35 cites·12 claims
- 0288US7705302B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2008·Granted Apr 27, 2010·13 cites·12 claims
- 0387US8629395B2Charged particle beam apparatusMORISHITA HIDEO·Filed 2011·Granted Jan 14, 2014·10 cites·17 claims
- 0477US6740877B2Scanning electron microscope and sample observation method using the sameHITACHI LTD·Filed 2003·Granted May 25, 2004·10 cites·8 claims
- 0577US6501077B1Scanning electron microscopeHITACHI LTD·Filed 1998·Granted Dec 31, 2002·31 cites·14 claims
- 0667US9202667B2Charged particle radiation device with bandpass detectionHATANO MICHIO·Filed 2010·Granted Dec 1, 2015·2 cites·11 claims
- 0751US11894211B2Electron beam apparatus and method for controlling electron beam apparatusHITACHI HIGH TECH CORP·Filed 2019·Granted Feb 6, 2024·0 cites·12 claims
- 0846US6855931B2Scanning electron microscope and sample observation method using the sameHITACHI LTD·Filed 2004·Granted Feb 15, 2005·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →