Inventor · disambiguated record

Chris Lary

Also filed as: LARY CHRIS

2 granted patents·2 citations·filing 2015–2018

40Inventor score

Technology areasH10P

Files withWAFERTECH LLC2

Top patents by PatentIndex Score

2 records

0166US10056276B2Fluid monitoring system and method for semiconductor fabrication toolsWAFERTECH LLC·Filed 2015·Granted Aug 21, 2018·2 cites·20 claims
0246US10438826B2Fluid monitoring system and method for semiconductor fabrication toolsWAFERTECH LLC·Filed 2018·Granted Oct 8, 2019·0 cites·20 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →