Assignee
WAFERTECH LLC
US34 patents
Top patents by PatentIndex Score
US8743585B2Jun 3, 2014
Semiconductor device with one-time programmable memory cell including anti-fuse with metal/polycide gate
WAFERTECH LLC5 citations80
US7489982B2Feb 10, 2009
Method and software for conducting efficient lithography WPH / lost time analysis in semiconductor manufacturing
WAFERTECH LLC13 citations76
US9275918B2Mar 1, 2016
Statistical method for monitoring manufacturing equipment and processing operations
WAFERTECH LLC3 citations68
US6129819AOct 10, 2000
Method for depositing high density plasma chemical vapor deposition oxide in high aspect ratio gaps
WAFERTECH LLC14 citations68
US10128325B2Nov 13, 2018
Inductor structures for integrated circuits
WAFERTECH LLC2 citations62
US9480938B2Nov 1, 2016
Method for using acoustic waves for purging filters in semiconductor manufacturing equipment
WAFERTECH LLC2 citations62
US9397227B2Jul 19, 2016
Split gate flash cell semiconductor device
WAFERTECH LLC1 citations62
US7127830B2Oct 31, 2006
Reticle carrier apparatus and method that tilts reticle for drying
WAFERTECH LLC2 citations62
US10056276B2Aug 21, 2018
Fluid monitoring system and method for semiconductor fabrication tools
WAFERTECH LLC2 citations60
US7659965B2Feb 9, 2010
High throughput wafer stage design for optical lithography exposure apparatus
WAFERTECH LLC2 citations60
US7631286B2Dec 8, 2009
Automated metrology recipe generation
WAFERTECH LLC6 citations60
US11175257B2Nov 16, 2021
Solid state sensor for metal ion detection and trapping in solution
WAFERTECH LLC0 citations58
US6669535B1Dec 30, 2003
Platform table for cleaning parts
WAFERTECH LLC7 citations58
US9257515B2Feb 9, 2016
Split gate flash cell semiconductor device
WAFERTECH LLC0 citations52
US9147577B2Sep 29, 2015
Floating gate flash cell device and method for partially etching silicon gate to form the same
WAFERTECH LLC0 citations52
US7572342B2Aug 11, 2009
Method and apparatus for cleaning semiconductor photolithography tools
WAFERTECH LLC1 citations52
US9564382B2Feb 7, 2017
Test structure for determining overlay accuracy in semiconductor devices using resistance measurement
WAFERTECH LLC0 citations51
US8841676B2Sep 23, 2014
Vertical integrated semiconductor device with multiple continuous single crystal silicon layers vertically separated from one another
WAFERTECH LLC1 citations51
US7142314B2Nov 28, 2006
Wafer stage position calibration method and system
WAFERTECH LLC6 citations51
US9362443B2Jun 7, 2016
Solar cell with absorber layer with three dimensional projections for energy harvesting, and method for forming the same
WAFERTECH LLC0 citations49
US10067084B2Sep 4, 2018
Solid state sensor for metal ion detection and trapping in solution
WAFERTECH LLC0 citations48
US9136271B2Sep 15, 2015
Semiconductor device with one-time programmable memory cell including anti-fuse with metal/polycide gate
WAFERTECH LLC0 citations48
US9064788B1Jun 23, 2015
Statistical method for monitoring manufacturing equipment and processing operations
WAFERTECH LLC1 citations47
US6942168B2Sep 13, 2005
Spray nozzle suitable for use in hot corrosive environments and method of use
WAFERTECH LLC5 citations46
US9261341B2Feb 16, 2016
Silicided MOS capacitor explosive device initiator
WAFERTECH LLC0 citations44
US9520355B2Dec 13, 2016
Voltage and temperature independent MIM capacitors
WAFERTECH LLC0 citations41
US9312351B2Apr 12, 2016
Floating gate flash cell with extended floating gate
WAFERTECH LLC0 citations41
US9831087B2Nov 28, 2017
Split gate embedded flash memory and method for forming the same
WAFERTECH LLC0 citations40
US10438826B2Oct 8, 2019
Fluid monitoring system and method for semiconductor fabrication tools
WAFERTECH LLC0 citations39
US9378954B2Jun 28, 2016
Plasma pre-treatment for improved uniformity in semiconductor manufacturing
WAFERTECH LLC0 citations39
US9618929B2Apr 11, 2017
Method and priority system for inventory management in semiconductor manufacturing
WAFERTECH LLC1 citations37
US10115789B2Oct 30, 2018
Nonvolatile memory cell with improved isolation structures
WAFERTECH LLC0 citations36
US9401367B2Jul 26, 2016
Nonvolatile memory cell with improved isolation structures
WAFERTECH LLC0 citations36
US9358555B2Jun 7, 2016
Threaded dispense nozzle and alignment method and device for photoresist and other fluid coaters
WAFERTECH LLC0 citations32