Inventor · disambiguated record

Mathias Irmscher

Also filed as: IRMSCHER MATHIAS

1 granted patent·34 citations·filing 2008–2008

45Inventor score

Technology areasH01J

Files withIMS NANOFABRICATION AG1

Top patents by PatentIndex Score

1 record

0191US7687783B2Multi-beam deflector array device for maskless particle-beam processingIMS NANOFABRICATION AG·Filed 2008·Granted Mar 30, 2010·34 cites·27 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →