Inventor · disambiguated record
Daniel Heenan
Also filed as: HEENAN DANIEL · HEENAN DANIEL M
2 granted patents·1 citations·filing 2003–2004
31Inventor score
Technology areasH10P
Files withIBM2
Top patents by PatentIndex Score
2 records- 0141US7040966B2Carbonation of pH controlled KOH solution for improved polishing of oxide films on semiconductor wafersIBM·Filed 2004·Granted May 9, 2006·1 cites·20 claims
- 0235US7214623B2Planarization system and method using a carbonate containing fluidIBM·Filed 2003·Granted May 8, 2007·0 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →