Inventor · disambiguated record
Oliver Goetzberger
Also filed as: GOETZBERGER OLIVER
1 granted patent·5 pending applications·45 citations·filing 2003–2006
48Inventor score
Top patents by PatentIndex Score
6 records- 0188US7029803B2Attenuating phase shift mask blank and photomaskIBM·Filed 2003·Granted Apr 18, 2006·45 cites·50 claims
- 0239US2006008749A1Method for manufacturing of a mask blank for EUV photolithography and mask blankSOBEL FRANK·Filed 2004·Application pending·0 cites
- 0337US2007128528A1Mask blank and photomask having antireflective propertiesHESS GUNTER·Filed 2006·Application pending·0 cites
- 0434US2005260504A1Mask blank having a protection layerBECKER HANS·Filed 2005·Application pending·0 cites
- 0534US2005190450A1Ultra high transmission phase shift mask blanksFiled 2005·Application pending·0 cites
- 0633US2006115744A1Method of producing a mask blank for photolithographic applications, and mask blankASCHKE LUTZ·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →