Inventor · disambiguated record
Claude Montcalm
Also filed as: MONTCALM CLAUDE
10 granted patents·2 pending applications·459 citations·filing 1997–2004
92Inventor score
Top patents by PatentIndex Score
12 records- 0191US5958605APassivating overcoat bilayer for multilayer reflective coatings for extreme ultraviolet lithographyUNIV CALIFORNIA·Filed 1997·Granted Sep 28, 1999·115 cites·25 claims
- 0290US6844272B2Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layersEUV LLC·Filed 2002·Granted Jan 18, 2005·40 cites·19 claims
- 0389US6011646AMethod to adjust multilayer film stress induced deformation of opticsUNVIERSITY OF CALIFORNIA·Filed 1998·Granted Jan 4, 2000·103 cites·27 claims
- 0486US6425988B1Method and system using power modulation for maskless vapor deposition of spatially graded thin film and multilayer coatings with atomic-level precision and accuracyFiled 2000·Granted Jul 30, 2002·26 cites·14 claims
- 0585US6134049AMethod to adjust multilayer film stress induced deformation of opticsUNIV CALIFORNIA·Filed 1998·Granted Oct 17, 2000·71 cites·23 claims
- 0684US6668207B1Method and system using power modulation and velocity modulation producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradientsUSA·Filed 2000·Granted Dec 23, 2003·24 cites·50 claims
- 0779US6634760B2Low-cost method for producing extreme ultraviolet lithography opticsUNIV CALIFORNIA·Filed 2001·Granted Oct 21, 2003·21 cites·15 claims
- 0877US6309705B1Process for fabricating high reflectance-low stress Mo—Si multilayer reflective coatingsUNIV CALIFORNIA·Filed 2000·Granted Oct 30, 2001·14 cites·14 claims
- 0970US6110607AHigh reflectance-low stress Mo-Si multilayer reflective coatingsUNIV CALIFORNIA·Filed 1998·Granted Aug 29, 2000·24 cites·15 claims
- 1064US6524449B1Method and system for producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradientsFiled 1999·Granted Feb 25, 2003·21 cites·47 claims
- 1140US2004260258A1Absorbent article having removable, edge-stiffening elementFiled 2003·Application pending·0 cites
- 1232US2008257715A1Method of Deposition with Reduction of Contaminants in An Ion Assist Beam and Associated ApparatusHOGHOJ PETER·Filed 2004·Application pending·0 cites
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