Inventor · disambiguated record

Minoru Kogano

Also filed as: KOGANO MINORU

1 granted patent·478 citations·filing 2002–2002

59Inventor score

Technology areasC30B

Files withHITACHI INT ELECTRIC INC1

Top patents by PatentIndex Score

1 record

0196US6503079B2Substrate processing apparatus and method for manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2002·Granted Jan 7, 2003·478 cites·18 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →