Inventor · disambiguated record
Fei-Fan Chen
Also filed as: CHEN FEI · CHEN FEI-FAN
8 granted patents·1 pending application·16 citations·filing 2011–2025
81Inventor score
Top patents by PatentIndex Score
9 records- 0187US2025329517A1Wafer processing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0283US10008367B2Gas diffuser unit, process chamber and wafer processing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 26, 2018·4 cites·12 claims
- 0383US8944003B2Remote plasma system and methodCHEN FEI-FAN·Filed 2012·Granted Feb 3, 2015·8 cites·20 claims
- 0476US10011532B2Remote plasma system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jul 3, 2018·2 cites·20 claims
- 0573US11245609B2Calibrating network analyzer devicesVIAVI SOLUTIONS INC·Filed 2017·Granted Feb 8, 2022·2 cites·23 claims
- 0671US12394602B2Wafer processing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 19, 2025·0 cites·20 claims
- 0763US11695678B2Calibrating network analyzer devicesVIAVI SOLUTIONS INC·Filed 2022·Granted Jul 4, 2023·0 cites·20 claims
- 0861US10741366B2Process chamber and wafer processing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 11, 2020·0 cites·20 claims
- 0938US8889435B2Plasma density controlWU WEN-SHENG·Filed 2011·Granted Nov 18, 2014·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →