Inventor · disambiguated record
Takeshi Kagaya
Also filed as: KAGAYA TAKESHI
4 granted patents·46 citations·filing 2003–2019
72Inventor score
Technology areasH10P
Files withTDK CORP4
Top patents by PatentIndex Score
4 records- 0181US7360346B2Purging system and purging method for the interior of a portable type hermetically sealed containerTDK CORP·Filed 2004·Granted Apr 22, 2008·30 cites·4 claims
- 0276US11199528B2Sensor built-in filter structure and wafer accommodation containerTDK CORP·Filed 2019·Granted Dec 14, 2021·2 cites·15 claims
- 0369US6795202B2Wafer processing apparatus having wafer mapping functionTDK CORP·Filed 2003·Granted Sep 21, 2004·14 cites·20 claims
- 0448US11521879B2Load port apparatus, semiconductor manufacturing apparatus, and method of controlling atmosphere in podTDK CORP·Filed 2019·Granted Dec 6, 2022·0 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →