Inventor · disambiguated record
Manoocher Birang
Also filed as: BIRANG MANOOCHER
167 granted patents·25 pending applications·7,526 citations·filing 1988–2025
99Inventor score
Files withAPPLIED MATERIALS INC166KATEEVA INC6ZAP SURGICAL SYSTEMS INC6BIRANG MANOOCHER5HANAWA HIROJI2
Top patents by PatentIndex Score
192 records- 0199US9656491B1Apparatus and method for control of print gapKATEEVA INC·Filed 2017·Granted May 23, 2017·17 cites·15 claims
- 0299US9550383B2Apparatus and method for control of print gapKATEEVA INC·Filed 2016·Granted Jan 24, 2017·18 cites·20 claims
- 0399US6280290B1Method of forming a transparent window in a polishing padAPPLIED MATERIALS INC·Filed 2000·Granted Aug 28, 2001·165 cites·15 claims
- 0499US6045439AForming a transparent window in a polishing pad for a chemical mechanical polishing apparatusAPPLIED MATERIALS INC·Filed 1999·Granted Apr 4, 2000·228 cites·20 claims
- 0599US5893796AForming a transparent window in a polishing pad for a chemical mechanical polishing apparatusAPPLIED MATERIALS INC·Filed 1996·Granted Apr 13, 1999·739 cites·18 claims
- 0698US6776692B1Closed-loop control of wafer polishing in a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2000·Granted Aug 17, 2004·92 cites·22 claims
- 0798US6537133B1Method for in-situ endpoint detection for chemical mechanical polishing operationsAPPLIED MATERIALS INC·Filed 2000·Granted Mar 25, 2003·161 cites·5 claims
- 0898US6183354B1Carrier head with a flexible membrane for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1997·Granted Feb 6, 2001·276 cites·92 claims
- 0997US7255629B2Polishing assembly with a windowAPPLIED MATERIALS INC·Filed 2006·Granted Aug 14, 2007·24 cites·15 claims
- 1097US7097537B1Determination of position of sensor measurements during polishingAPPLIED MATERIALS INC·Filed 2004·Granted Aug 29, 2006·81 cites·35 claims
- 1197US6924641B1Method and apparatus for monitoring a metal layer during chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2000·Granted Aug 2, 2005·63 cites·28 claims
- 1297US6179709B1In-situ monitoring of linear substrate polishing operationsAPPLIED MATERIALS INC·Filed 1999·Granted Jan 30, 2001·181 cites·15 claims
- 1397US5964643AApparatus and method for in-situ monitoring of chemical mechanical polishing operationsAPPLIED MATERIALS INC·Filed 1996·Granted Oct 12, 1999·458 cites·15 claims
- 1496US7935240B2Electroplating apparatus and method based on an array of anodesAPPLIED MATERIALS INC·Filed 2006·Granted May 3, 2011·37 cites·11 claims
- 1596US7118450B2Polishing pad with window and method of fabricating a window in a polishing padAPPLIED MATERIALS INC·Filed 2005·Granted Oct 10, 2006·19 cites·17 claims
- 1696US7118457B2Method of forming a polishing pad for endpoint detectionAPPLIED MATERIALS INC·Filed 2005·Granted Oct 10, 2006·19 cites·21 claims
- 1796US6676717B1Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operationsAPPLIED MATERIALS INC·Filed 2000·Granted Jan 13, 2004·58 cites·27 claims
- 1896US6296548B1Method and apparatus for optical monitoring in chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2000·Granted Oct 2, 2001·132 cites·15 claims
- 1996US6244935B1Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheetAPPLIED MATERIALS INC·Filed 1999·Granted Jun 12, 2001·178 cites·42 claims
- 2096US6159079ACarrier head for chemical mechanical polishing a substrateAPPLIED MATERIALS INC·Filed 1998·Granted Dec 12, 2000·152 cites·26 claims
- 2195US7229340B2Monitoring a metal layer during chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2006·Granted Jun 12, 2007·15 cites·23 claims
- 2295US6975107B2Eddy current sensing of metal removal for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2003·Granted Dec 13, 2005·35 cites·14 claims
- 2395US6939198B1Polishing system with in-line and in-situ metrologyAPPLIED MATERIALS INC·Filed 2002·Granted Sep 6, 2005·70 cites·32 claims
- 2495US5745331AElectrostatic chuck with conformal insulator filmAPPLIED MATERIALS INC·Filed 1995·Granted Apr 28, 1998·166 cites·42 claims
- 2595US5708506AApparatus and method for detecting surface roughness in a chemical polishing pad conditioning processAPPLIED MATERIALS INC·Filed 1995·Granted Jan 13, 1998·131 cites·53 claims
- 2694US9302513B2Apparatus and method for control of print gapKATEEVA INC·Filed 2015·Granted Apr 5, 2016·4 cites·23 claims
- 2794US8858298B2Polishing pad with two-section window having recessAPPLIED MATERIALS INC·Filed 2013·Granted Oct 14, 2014·7 cites·12 claims
- 2894US7112960B2Eddy current system for in-situ profile measurementAPPLIED MATERIALS INC·Filed 2003·Granted Sep 26, 2006·87 cites·28 claims
- 2994US6623334B1Chemical mechanical polishing with friction-based controlAPPLIED MATERIALS INC·Filed 2000·Granted Sep 23, 2003·41 cites·23 claims
- 3094US6413873B1System for chemical mechanical planarizationAPPLIED MATERIALS INC·Filed 2000·Granted Jul 2, 2002·85 cites·3 claims
- 3194US6247998B1Method and apparatus for determining substrate layer thickness during chemical mechanical polishingAPPLIED MATERIALS INC·Filed 1999·Granted Jun 19, 2001·124 cites·50 claims
- 3293US7294039B2Polishing system with in-line and in-situ metrologyAPPLIED MATERIALS INC·Filed 2006·Granted Nov 13, 2007·15 cites·4 claims
- 3393US7101251B2Polishing system with in-line and in-situ metrologyAPPLIED MATERIALS INC·Filed 2005·Granted Sep 5, 2006·15 cites·8 claims
- 3493US7008295B2Substrate monitoring during chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2003·Granted Mar 7, 2006·43 cites·53 claims
- 3593US6910944B2Method of forming a transparent window in a polishing padAPPLIED MATERIALS INC·Filed 2001·Granted Jun 28, 2005·28 cites·45 claims
- 3693US6878038B2Combined eddy current sensing and optical monitoring for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2001·Granted Apr 12, 2005·40 cites·7 claims
- 3793US6572446B1Chemical mechanical polishing pad conditioning element with discrete points and compliant membraneAPPLIED MATERIALS INC·Filed 2000·Granted Jun 3, 2003·46 cites·42 claims
- 3892US7727364B2Auxiliary electrode encased in cation exchange membrane tube for electroplating cellAPPLIED MATERIALS INC·Filed 2006·Granted Jun 1, 2010·17 cites·27 claims
- 3992US7513818B2Polishing endpoint detection system and method using friction sensorAPPLIED MATERIALS INC·Filed 2004·Granted Apr 7, 2009·41 cites·24 claims
- 4092US6841057B2Method and apparatus for substrate polishingAPPLIED MATERIALS INC·Filed 2002·Granted Jan 11, 2005·21 cites·38 claims
- 4192US6796880B2Linear polishing sheet with windowAPPLIED MATERIALS INC·Filed 2003·Granted Sep 28, 2004·42 cites·22 claims
- 4292US6383058B1Adaptive endpoint detection for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2000·Granted May 7, 2002·63 cites·33 claims
- 4392US6146259ACarrier head with local pressure control for a chemical mechanical polishing apparatusAPPLIED MATERIALS INC·Filed 1997·Granted Nov 14, 2000·81 cites·28 claims
- 4492US5846882AEndpoint detector for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 1996·Granted Dec 8, 1998·152 cites·15 claims
- 4592US5743784AApparatus and method to determine the coefficient of friction of a chemical mechanical polishing pad during a pad conditioning process and to use it to control the processAPPLIED MATERIALS INC·Filed 1995·Granted Apr 28, 1998·122 cites·31 claims
- 4691US7074109B1Chemical mechanical polishing control system and methodAPPLIED MATERIALS INC·Filed 2004·Granted Jul 11, 2006·50 cites·24 claims
- 4791US7001242B2Method and apparatus of eddy current monitoring for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2002·Granted Feb 21, 2006·28 cites·18 claims
- 4891US6966816B2Integrated endpoint detection system with optical and eddy current monitoringAPPLIED MATERIALS INC·Filed 2001·Granted Nov 22, 2005·45 cites·12 claims
- 4990US7841926B2Substrate polishing metrology using interference signalsAPPLIED MATERIALS INC·Filed 2010·Granted Nov 30, 2010·8 cites·12 claims
- 5090US7682221B2Integrated endpoint detection system with optical and eddy current monitoringAPPLIED MATERIALS INC·Filed 2007·Granted Mar 23, 2010·12 cites·6 claims
Showing the top 50 of 192 patent records by PatentIndex Score.
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