Inventor · disambiguated record
Chiukin Lai
Also filed as: LAI CHIUKIN · LAI CHIUKIN S · LAI CHIUKIN STEVE · LAI CHIUKIN STEVEN
4 granted patents·2 pending applications·30 citations·filing 2001–2011
74Inventor score
Top patents by PatentIndex Score
6 records- 0188US7550381B2Contact clean by remote plasma and repair of silicide surfaceAPPLIED MATERIALS INC·Filed 2005·Granted Jun 23, 2009·12 cites·14 claims
- 0284US7867789B2Contact clean by remote plasma and repair of silicide surfaceAPPLIED MATERIALS INC·Filed 2009·Granted Jan 11, 2011·7 cites·20 claims
- 0367US6933021B2Method of TiSiN deposition using a chemical vapor deposition (CVD) processAPPLIED MATERIALS INC·Filed 2002·Granted Aug 23, 2005·11 cites·40 claims
- 0449US9147578B2Contact clean by remote plasma and repair of silicide surfaceLU XINLIANG·Filed 2011·Granted Sep 29, 2015·0 cites·23 claims
- 0545US2006093730A1Monitoring a flow distribution of an energized gasAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 0636US2002114886A1Method of tisin deposition using a chemical vapor deposition processAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
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