Inventor · disambiguated record
Akihito Fushimi
Also filed as: FUSHIMI AKIHITO
4 granted patents·1 pending application·3 citations·filing 2014–2020
59Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0181US10410902B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Sep 10, 2019·3 cites·2 claims
- 0253US9953854B2Method of adsorbing target object on mounting table and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Apr 24, 2018·0 cites·2 claims
- 0349US10141164B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Nov 27, 2018·0 cites·4 claims
- 0441US11373895B2Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jun 28, 2022·0 cites·20 claims
- 0531US2018204757A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →