Inventor · disambiguated record
Tomokazu Sushihara
Also filed as: SUSHIHARA TOMOKAZU
2 granted patents·3 pending applications·24 citations·filing 2003–2011
53Inventor score
Top patents by PatentIndex Score
5 records- 0178US6881684B2Method of forming silicon nitride deposited filmCANON KK·Filed 2003·Granted Apr 19, 2005·24 cites·8 claims
- 0257US2010078113A1Method for depositing film and film deposition apparatusCANON KK·Filed 2009·Application pending·0 cites
- 0354US2009061084A1Vapor deposition system and vapor deposition methodCANON KK·Filed 2008·Application pending·0 cites
- 0437US7582185B2Plasma-processing apparatusCANON KK·Filed 2003·Granted Sep 1, 2009·0 cites·8 claims
- 0530US2012103254A1Thin-film formation system and organic el device manufacturing systemSUSHIHARA TOMOKAZU·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →