Inventor · disambiguated record
Fumio Aramaki
Also filed as: ARAMAKI FUMIO
14 granted patents·3 pending applications·26 citations·filing 2004–2020
88Inventor score
Top patents by PatentIndex Score
17 records- 0185US8460842B2Defect repair apparatus and method for EUV mask using a hydrogen ion beamOGAWA TAKASHI·Filed 2011·Granted Jun 11, 2013·7 cites·23 claims
- 0282US8764994B2Method for fabricating emitterHITACHI HIGH TECH SCIENCE CORP·Filed 2013·Granted Jul 1, 2014·4 cites·4 claims
- 0381US8963100B2Nitrogen ions from a gas field ion source held at a pressure of 1.0 x 10^(-6) pa to 1.0 x 10^(-2) paYASAKA ANTO·Filed 2012·Granted Feb 24, 2015·6 cites·18 claims
- 0480US9773634B2Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatusHITACHI HIGH-TECH SCIENCE CORP·Filed 2017·Granted Sep 26, 2017·2 cites·11 claims
- 0574US9378858B2Repair apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2014·Granted Jun 28, 2016·2 cites·5 claims
- 0671US9418817B2Focused ion beam apparatus and control method thereofHITACHI HIGH-TECH SCIENCE CORP·Filed 2014·Granted Aug 16, 2016·2 cites·17 claims
- 0770US8890093B2Charged particle beam apparatus and method for forming observation imageHITACHI HIGH TECH SCIENCE CORP·Filed 2014·Granted Nov 18, 2014·2 cites·6 claims
- 0868US9336979B2Focused ion beam apparatus with precious metal emitter surfaceHITACHI HIGH TECH SCIENCE CORP·Filed 2015·Granted May 10, 2016·1 cites·12 claims
- 0959US9583299B2Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatusHITACHI HIGH-TECH SCIENCE CORP·Filed 2014·Granted Feb 28, 2017·0 cites·1 claims
- 1059US8999178B2Method for fabricating emitterHITACHI HIGH TECH SCIENCE CORP·Filed 2014·Granted Apr 7, 2015·0 cites·4 claims
- 1156US10276343B2Method for acquiring image and ion beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2018·Granted Apr 30, 2019·0 cites·6 claims
- 1252US10014157B2Method for acquiring image and ion beam apparatusHITACHI HIGH TECH SCIENCE CORP·Filed 2016·Granted Jul 3, 2018·0 cites·4 claims
- 1352US9793085B2Focused ion beam apparatusHITACHI HIGH-TECH SCIENCE CORP·Filed 2016·Granted Oct 17, 2017·0 cites·11 claims
- 1452US2016322123A1Repair ApparatusHITACHI HIGH-TECH SCIENCE CORP·Filed 2016·Application pending·0 cites
- 1548US2020310245A1Mask repair apparatus and method for repairing maskHITACHI HIGH TECH SCIENCE CORP·Filed 2020·Application pending·0 cites
- 1643US2004209172A1Defect correction method for a photomaskFiled 2004·Application pending·0 cites
- 1731US9793092B2Charged particle beam apparatus and processing methodHITACHI HIGH-TECH SCIENCE CORP·Filed 2015·Granted Oct 17, 2017·0 cites·6 claims
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