Inventor · disambiguated record
Li-Chih Chaio
Also filed as: CHAIO LI-CHIH
2 granted patents·16 citations·filing 2002–2002
57Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG2
Top patents by PatentIndex Score
2 records- 0166US6828251B2Method for improved plasma etching controlTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Dec 7, 2004·12 cites·12 claims
- 0251US6884728B2Method for removing polymeric residue contamination on semiconductor feature sidewallsTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Apr 26, 2005·4 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →