Inventor · disambiguated record
Averginos V. Gelatos
Also filed as: GELATOS AVERGINOS V
2 granted patents·144 citations·filing 2005–2009
69Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0197US7405158B2Methods for depositing tungsten layers employing atomic layer deposition techniquesAPPLIED MATERIALS INC·Filed 2005·Granted Jul 29, 2008·105 cites·29 claims
- 0292US8071478B2Method of depositing tungsten film with reduced resistivity and improved surface morphologyWU KAI·Filed 2009·Granted Dec 6, 2011·39 cites·23 claims
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