Inventor · disambiguated record
Georgiy O. Vaschenko
Also filed as: VASCHENKO GEORGIY · VASCHENKO GEORGIY O · VASCHENKO GEORGIY OLEGOVICH
28 granted patents·3 pending applications·247 citations·filing 2007–2023
96Inventor score
Files withASML NETHERLANDS BV18VASCHENKO GEORGIY O5CYMER INC2RAJYAGURU CHIRAG2UNIV COLORADO STATE RES FOUND2
Top patents by PatentIndex Score
31 records- 0197US8158960B2Laser produced plasma EUV light sourceVASCHENKO GEORGIY O·Filed 2010·Granted Apr 17, 2012·35 cites·20 claims
- 0297US7872245B2Systems and methods for target material delivery in a laser produced plasma EUV light sourceCYMER INC·Filed 2008·Granted Jan 18, 2011·90 cites·25 claims
- 0395US8513629B2Droplet generator with actuator induced nozzle cleaningRAJYAGURU CHIRAG·Filed 2011·Granted Aug 20, 2013·24 cites·22 claims
- 0492US9029813B2Filter for material supply apparatus of an extreme ultraviolet light sourceFOMENKOV IGOR V·Filed 2011·Granted May 12, 2015·13 cites·42 claims
- 0592US8138487B2System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamberVASCHENKO GEORGIY O·Filed 2010·Granted Mar 20, 2012·16 cites·22 claims
- 0692US7897947B2Laser produced plasma EUV light source having a droplet stream produced using a modulated disturbance waveCYMER INC·Filed 2007·Granted Mar 1, 2011·33 cites·17 claims
- 0783US9392678B2Target material supply apparatus for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2012·Granted Jul 12, 2016·5 cites·28 claims
- 0882US12273986B2Target delivery systemASML NETHERLANDS BV·Filed 2023·Granted Apr 8, 2025·0 cites·20 claims
- 0981US9632418B2Target material supply apparatus for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2016·Granted Apr 25, 2017·2 cites·17 claims
- 1081US8530871B2Laser produced plasma EUV light sourceVASCHENKO GEORGIY O·Filed 2012·Granted Sep 10, 2013·4 cites·10 claims
- 1178US8829477B2Droplet generator with actuator induced nozzle cleaningRAJYAGURU CHIRAG·Filed 2013·Granted Sep 9, 2014·4 cites·22 claims
- 1277US8748854B2Laser produced plasma EUV light sourceCymer LLC·Filed 2013·Granted Jun 10, 2014·3 cites·11 claims
- 1376US8969840B2Droplet generator with actuator induced nozzle cleaningASML NETHERLANDS BV·Filed 2014·Granted Mar 3, 2015·3 cites·20 claims
- 1475US11448967B2Target formation apparatusASML NETHERLANDS BV·Filed 2019·Granted Sep 20, 2022·1 cites·21 claims
- 1572US8969839B2Laser produced plasma EUV light sourceASML NETHERLANDS BV·Filed 2014·Granted Mar 3, 2015·2 cites·20 claims
- 1672US7931850B2Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray lightUNIV COLORADO STATE RES FOUND·Filed 2010·Granted Apr 26, 2011·2 cites·10 claims
- 1768US11856681B2Target delivery systemASML NETHERLANDS BV·Filed 2020·Granted Dec 26, 2023·0 cites·27 claims
- 1868US10481498B2Droplet generator for lithographic apparatus, EUV source and lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Nov 19, 2019·1 cites·21 claims
- 1966US8319201B2Laser produced plasma EUV light source having a droplet stream produced using a modulated disturbance waveVASCHENKO GEORGIY O·Filed 2011·Granted Nov 27, 2012·2 cites·26 claims
- 2062US10904994B2Supply system for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2019·Granted Jan 26, 2021·0 cites·28 claims
- 2162US9699876B2Method of and apparatus for supply and recovery of target materialASML NETHERLANDS BV·Filed 2014·Granted Jul 4, 2017·3 cites·17 claims
- 2261US12452986B2Nozzle apparatusASML NETHERLANDS BV·Filed 2020·Granted Oct 21, 2025·0 cites·21 claims
- 2360US11317501B2Method of purifying target material for an EUV light sourceASML NETHERLANDS BV·Filed 2019·Granted Apr 26, 2022·0 cites·15 claims
- 2458US10499485B2Supply system for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2018·Granted Dec 3, 2019·0 cites·25 claims
- 2556US11690159B2Apparatus and method for extending target material delivery system lifetimeASML NETHERLANDS BV·Filed 2019·Granted Jun 27, 2023·0 cites·20 claims
- 2654US2008093775A1Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray lightUNIV COLORADO STATE RES FOUND·Filed 2007·Application pending·0 cites
- 2753US10455680B2Method and apparatus for purifying target material for EUV light sourceASML NETHERLANDS BV·Filed 2016·Granted Oct 22, 2019·0 cites·17 claims
- 2852US2023164900A1Apparatus for and method of accelerating droplets in a droplet generator for an euv sourceASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 2950US8969838B2Systems and methods for protecting an EUV light source chamber from high pressure source material leaksVASCHENKO GEORGIY O·Filed 2009·Granted Mar 3, 2015·4 cites·20 claims
- 3045US2025227834A1High pressure coupling assemblyASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 3140US10632505B2System method and apparatus for high pressure liquid jet cleaning of sintered filtersASML NETHERLANDS BV·Filed 2016·Granted Apr 28, 2020·0 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →