Inventor · disambiguated record

Pei Wei Yeh

Also filed as: YEH PEI WEI

2 granted patents·48 citations·filing 1999–2001

62Inventor score

Technology areasB24B H10P

Files withAPPLIED MATERIALS INC1 TAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

2 records

0171US6206760B1Method and apparatus for preventing particle contamination in a polishing machineTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Mar 27, 2001·42 cites·25 claims
0247US6582288B2Diaphragm for chemical mechanical polisherAPPLIED MATERIALS INC·Filed 2001·Granted Jun 24, 2003·6 cites·21 claims

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