Inventor · disambiguated record

Yanwen Hou

Also filed as: HOU YANWEN

1 granted patent·0 citations·filing 2007–2007

7Inventor score

Technology areasG01N

Files withRUDOLPH TECHNOLOGIES INC1

Top patents by PatentIndex Score

1 record

0141US7903238B2Combination of ellipsometry and optical stress generation and detectionRUDOLPH TECHNOLOGIES INC·Filed 2007·Granted Mar 8, 2011·0 cites·24 claims

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