Inventor · disambiguated record
Stephanie A. Yoshikawa
Also filed as: YOSHIKAWA STEPHANIE A
3 granted patents·369 citations·filing 1997–1997
78Inventor score
Files withLSI LOGIC CORP3
Top patents by PatentIndex Score
3 records- 0194US5933757AEtch process selective to cobalt silicide for formation of integrated circuit structuresLSI LOGIC CORP·Filed 1997·Granted Aug 3, 1999·265 cites·19 claims
- 0289US5902129AProcess for forming improved cobalt silicide layer on integrated circuit structure using two capping layersLSI LOGIC CORP·Filed 1997·Granted May 11, 1999·87 cites·20 claims
- 0343US6054062AMethod and apparatus for agitating an etchantLSI LOGIC CORP·Filed 1997·Granted Apr 25, 2000·17 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →