Inventor · disambiguated record
Hiroshi Shirasu
Also filed as: SHIRASU HIROSHI
46 granted patents·5 pending applications·2,126 citations·filing 1978–2023
99Inventor score
Top patents by PatentIndex Score
51 records- 0199US6795169B2Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatusNIKON CORP·Filed 2003·Granted Sep 21, 2004·481 cites·21 claims
- 0297US6811953B2Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdeviceNIKON CORP·Filed 2001·Granted Nov 2, 2004·456 cites·23 claims
- 0397US5729331AExposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatusNIKON CORP·Filed 1995·Granted Mar 17, 1998·134 cites·74 claims
- 0496US4939630AIllumination optical apparatusNIKON CORP·Filed 1988·Granted Jul 3, 1990·115 cites·14 claims
- 0592US4769523ALaser processing apparatusNIPPON KOGAKU KK·Filed 1987·Granted Sep 6, 1988·153 cites·23 claims
- 0690US6556278B1Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjustedNIKON CORP·Filed 2000·Granted Apr 29, 2003·26 cites·62 claims
- 0787US9539800B2Substrate bonding apparatus, substrate holding apparatus, substrate bonding method, substrate holding method, multilayered semiconductor device, and multilayered substrateNIKON CORP·Filed 2013·Granted Jan 10, 2017·9 cites·27 claims
- 0887US4710604AMachining apparatus with laser beamNIPPON KOGAKU KK·Filed 1986·Granted Dec 1, 1987·53 cites·14 claims
- 0986US7372544B2Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatusNIKON CORP·Filed 2007·Granted May 13, 2008·8 cites·16 claims
- 1086US5581075AMulti-beam scanning projection exposure apparatus and method with beam monitoring and control for uniform exposure of large areaNIKON CORP·Filed 1995·Granted Dec 3, 1996·64 cites·43 claims
- 1185US7372543B2Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatusNIKON CORP·Filed 2006·Granted May 13, 2008·7 cites·28 claims
- 1285US5715037AScanning exposure apparatusNIKON CORP·Filed 1996·Granted Feb 3, 1998·59 cites·17 claims
- 1383US6266131B1Exposure apparatusNIKON CORP·Filed 1999·Granted Jul 24, 2001·60 cites·20 claims
- 1483US5923409AScanning-type exposure apparatus including a vertically disposed holder surface and method thereofNIKON CORP·Filed 1997·Granted Jul 13, 1999·17 cites·59 claims
- 1581US5657130AExposure apparatus and methodNIKON CORP·Filed 1995·Granted Aug 12, 1997·49 cites·35 claims
- 1680US5617181AExposure apparatus and exposure methodNIKON CORP·Filed 1996·Granted Apr 1, 1997·46 cites·25 claims
- 1779US5920378AProjection exposure apparatusNIKON CORP·Filed 1997·Granted Jul 6, 1999·42 cites·20 claims
- 1878US5760881AExposure apparatus with light shielding portion for plotosensitive elementsNIKON CORP·Filed 1995·Granted Jun 2, 1998·42 cites·11 claims
- 1977US7023527B2Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatusNIKON CORP·Filed 2004·Granted Apr 4, 2006·7 cites·20 claims
- 2077US6351305B1Exposure apparatus and exposure method for transferring pattern onto a substrateNIKON CORP·Filed 1998·Granted Feb 26, 2002·26 cites·136 claims
- 2173US4340819APhotoelectric element array with automatic control of the charge storage timeNIPPON KOGAKU KK·Filed 1981·Granted Jul 20, 1982·21 cites·9 claims
- 2271US5774240AExposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniquesNIKON CORP·Filed 1995·Granted Jun 30, 1998·29 cites·6 claims
- 2371US4880308AAligning apparatusNIKON CORP·Filed 1988·Granted Nov 14, 1989·21 cites·17 claims
- 2470US4264810AFocus detecting apparatusNIPPON KOGAKU KK·Filed 1978·Granted Apr 28, 1981·22 cites·19 claims
- 2568US5504596AExposure method and apparatus using holographic techniquesNIKON CORP·Filed 1993·Granted Apr 2, 1996·29 cites·3 claims
- 2667US8699001B2Object moving apparatus, object processing apparatus, exposure apparatus, object inspecting apparatus and device manufacturing methodAOKI YASUO·Filed 2010·Granted Apr 15, 2014·2 cites·34 claims
- 2767US2020225589A1Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive methodNIKON CORP·Filed 2020·Application pending·0 cites
- 2865US10627725B2Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive methodNIKON CORP·Filed 2019·Granted Apr 21, 2020·0 cites·14 claims
- 2964US11791223B2Substrate bonding apparatus and substrate bonding methodNIKON CORP·Filed 2018·Granted Oct 17, 2023·1 cites·25 claims
- 3064US6570641B2Projection exposure apparatusNIKON CORP·Filed 2001·Granted May 27, 2003·6 cites·23 claims
- 3164US5528390AExposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniquesNIKON CORP·Filed 1995·Granted Jun 18, 1996·22 cites·8 claims
- 3264US2024014079A1Substrate bonding apparatus and substrate bonding methodNIKON CORP·Filed 2023·Application pending·0 cites
- 3363US8704431B2Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing methodSHIRASU HIROSHI·Filed 2012·Granted Apr 22, 2014·1 cites·11 claims
- 3461US4297571AFocus detecting deviceNIPPON KOGAKU KK·Filed 1980·Granted Oct 27, 1981·18 cites·4 claims
- 3559US9366974B2Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive methodAOKI YASUO·Filed 2009·Granted Jun 14, 2016·0 cites·80 claims
- 3657US10228625B2Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive methodNIKON CORP·Filed 2016·Granted Mar 12, 2019·0 cites·21 claims
- 3755US4336450AFocus detecting apparatusNIPPON KOGAKU KK·Filed 1980·Granted Jun 22, 1982·14 cites·9 claims
- 3854US8531093B2Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing methodSHIRASU HIROSHI·Filed 2007·Granted Sep 10, 2013·1 cites·23 claims
- 3953US5798822AExposure apparatusNIKON CORP·Filed 1997·Granted Aug 25, 1998·14 cites·19 claims
- 4051US5686997AScanning projection exposure method and projection exposure apparatusNIKON CORP·Filed 1996·Granted Nov 11, 1997·16 cites·11 claims
- 4151US4368383ASystem for focus detection utilizing a photoelectric sensor arrayNIPPON KOGAKU KK·Filed 1981·Granted Jan 11, 1983·4 cites·13 claims
- 4250US4319238ACamera display deviceNIPPON KOGAKU KK·Filed 1980·Granted Mar 9, 1982·11 cites·2 claims
- 4347US6049372AExposure apparatusNIKON CORP·Filed 1997·Granted Apr 11, 2000·10 cites·37 claims
- 4447US5523574AExposure apparatusNIKON CORP·Filed 1995·Granted Jun 4, 1996·10 cites·11 claims
- 4546US4291224ALight image space frequency component extracting deviceNIPPON KOGAKU KK·Filed 1979·Granted Sep 22, 1981·8 cites·4 claims
- 4638US4306143ADevice for extracting a plurality of space frequency componentsNIPPON KOGAKU KK·Filed 1980·Granted Dec 15, 1981·6 cites·4 claims
- 4737US2011042874A1Object processing apparatus, exposure apparatus and exposure method, and device manufacturing methodNIKON CORP·Filed 2010·Application pending·0 cites
- 4836US2011085152A1Vibration control apparatus, vibration control method, exposure apparatus, and device manufacturing methodNISHINO HIDEAKI·Filed 2010·Application pending·0 cites
- 4934US4339665AApparatus for detecting displacement of optical imageNIPPON KOGAKU KK·Filed 1980·Granted Jul 13, 1982·3 cites·3 claims
- 5032US6317196B1Projection exposure apparatusNIKON CORP·Filed 1998·Granted Nov 13, 2001·3 cites·50 claims
Showing the top 50 of 51 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →