Inventor · disambiguated record
Motoo Koyama
Also filed as: KOYAMA MOTOO
12 granted patents·2 pending applications·779 citations·filing 1996–2014
92Inventor score
Top patents by PatentIndex Score
14 records- 0197US6811953B2Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdeviceNIKON CORP·Filed 2001·Granted Nov 2, 2004·456 cites·23 claims
- 0292US6489624B1Apparatus and methods for detecting thickness of a patterned layerNIKON CORP·Filed 1998·Granted Dec 3, 2002·115 cites·32 claims
- 0387US5793473AProjection optical apparatus for projecting a mask pattern onto the surface of a target projection object and projection exposure apparatus using the sameNIKON CORP·Filed 1997·Granted Aug 11, 1998·68 cites·32 claims
- 0483US6102775AFilm inspection methodNIKON CORP·Filed 1998·Granted Aug 15, 2000·59 cites·6 claims
- 0568US6339219B1Radiation imaging device and radiation detectorNIKON CORP·Filed 1999·Granted Jan 15, 2002·37 cites·18 claims
- 0663US8704431B2Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing methodSHIRASU HIROSHI·Filed 2012·Granted Apr 22, 2014·1 cites·11 claims
- 0762US5839808AProjection optical systemNIKON CORP·Filed 1996·Granted Nov 24, 1998·9 cites·15 claims
- 0854US8531093B2Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing methodSHIRASU HIROSHI·Filed 2007·Granted Sep 10, 2013·1 cites·23 claims
- 0953US5949503AReflective liquid crystal spatial light modulator and projection apparatus comprising sameNIKON CORP·Filed 1996·Granted Sep 7, 1999·19 cites·22 claims
- 1047US2015138834A1Light source device and electronic apparatusNIKON CORP·Filed 2014·Application pending·0 cites
- 1145US5909307AOptical system for infrared cameraNIKON CORP·Filed 1997·Granted Jun 1, 1999·12 cites·12 claims
- 1244US6750951B2Optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2001·Granted Jun 15, 2004·2 cites·24 claims
- 1343US7573019B2Light detecting apparatus, illumination optical apparatus, exposure apparatus and exposure methodNIKON CORP·Filed 2005·Granted Aug 11, 2009·0 cites·51 claims
- 1436US2003227607A1Exposure apparatus and an exposure methodFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →