Inventor · disambiguated record

Michael R. Fahy

Also filed as: FAHY MICHAEL R

2 granted patents·10 citations·filing 2001–2002

48Inventor score

Technology areasG03F H10P

Files withINTEL CORP2

Top patents by PatentIndex Score

2 records

0157US6864144B2Method of stabilizing resist material through ion implantationINTEL CORP·Filed 2002·Granted Mar 8, 2005·10 cites·10 claims
0229US6649529B2Method of substrate processing and photoresist exposureINTEL CORP·Filed 2001·Granted Nov 18, 2003·0 cites·28 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →