Inventor · disambiguated record
Iraj Shahvandi
Also filed as: SHAHVANDI IRAJ · SHAHVANDI IRAJ E · SHAHVANDI IRAJ ERIC
6 granted patents·2 pending applications·166 citations·filing 1993–2002
84Inventor score
Files withMOTOROLA INC6
Top patents by PatentIndex Score
8 records- 0185US6290491B1Method for heating a semiconductor wafer in a process chamber by a shower head, and process chamberMOTOROLA INC·Filed 2000·Granted Sep 18, 2001·52 cites·7 claims
- 0282US5358615AProcess for forming a sputter deposited metal filmMOTOROLA INC·Filed 1993·Granted Oct 25, 1994·54 cites·10 claims
- 0367US5405491APlasma etching processMOTOROLA INC·Filed 1994·Granted Apr 11, 1995·47 cites·11 claims
- 0463US6786222B2Method for removing particles from a semiconductor processing toolMOTOROLA INC·Filed 2002·Granted Sep 7, 2004·9 cites·21 claims
- 0543US6217660B1Method for cleaning a throttle valve and apparatusMOTOROLA INC·Filed 2000·Granted Apr 17, 2001·2 cites·8 claims
- 0642US6362098B1Plasma-enhanced chemical vapor deposition (CVD) method to fill a trench in a semiconductor substrateMOTOROLA INC·Filed 2001·Granted Mar 26, 2002·2 cites·12 claims
- 0734US2003203615A1Method for depositing barrier layers in an openingFiled 2002·Application pending·0 cites
- 0827US2003082031A1Wafer handling device and method for testing wafersFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →