Inventor · disambiguated record
Richard Wistrom
Also filed as: WISTROM RICHARD · WISTROM RICHARD E
6 granted patents·7 citations·filing 1998–2016
74Inventor score
Top patents by PatentIndex Score
6 records- 0167US10168612B2Photomask blank including a thin chromium hardmaskGLOBALFOUNDRIES INC·Filed 2016·Granted Jan 1, 2019·1 cites·14 claims
- 0266US7355680B2Method for adjusting lithographic mask flatness using thermally induced pellicle stressIBM·Filed 2005·Granted Apr 8, 2008·2 cites·14 claims
- 0348US6989105B2Detection of hardmask removal using a selective etchIBM·Filed 2003·Granted Jan 24, 2006·2 cites·16 claims
- 0443US9964847B2Mask substrate structureGLOBALFOUNDRIES INC·Filed 2016·Granted May 8, 2018·0 cites·20 claims
- 0540US6391661B2Semiconductor and method of fabricatingIBM·Filed 2001·Granted May 21, 2002·1 cites·15 claims
- 0629US6229155B1Semiconductor and method of fabricatingIBM·Filed 1998·Granted May 8, 2001·1 cites·17 claims
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