Inventor · disambiguated record
Rainer Lebert
Also filed as: LEBERT RAINER · LEBERT RAINER-HELMUT
7 granted patents·198 citations·filing 1990–2020
85Inventor score
Files withAIXUV GMBH1FRAUNHOFER GES FORSCHUNG1FRAUNHOGER GES ZUR FOERDERUNG1QIMONDA AG1RI RES INSTRUMENTS GMBH1
Top patents by PatentIndex Score
7 records- 0189US5023897ADevice for generating X-radiation with a plasma sourceZEISS STIFTUNG·Filed 1990·Granted Jun 11, 1991·131 cites·12 claims
- 0276US7619232B2Method and device for producing extreme ultraviolet radiation or soft X-ray radiationXTREME TECH GMBH·Filed 2003·Granted Nov 17, 2009·20 cites·29 claims
- 0369US6788763B1Device for producing an extreme ultraviolet and soft x radiation from a gaseous dischargeFRAUNHOFER GES FORSCHUNG·Filed 2000·Granted Sep 7, 2004·11 cites·28 claims
- 0456US6389106B1Method and device for producing extreme ultraviolet and soft X-rays from a gaseous dischargeFRAUNHOGER GES ZUR FOERDERUNG·Filed 1998·Granted May 14, 2002·31 cites·20 claims
- 0551US6856395B2Reflectometer arrangement and method for determining the reflectance of selected measurement locations of measurement objects reflecting in a spectrally dependent mannerAIXUV GMBH·Filed 2002·Granted Feb 15, 2005·4 cites·11 claims
- 0637US7378666B2Irradiation device for testing objects coated with light-sensitive paintQIMONDA AG·Filed 2003·Granted May 27, 2008·1 cites·20 claims
- 0735US11615897B2Microscopic system for testing structures and defects on EUV lithography photomasksRI RES INSTRUMENTS GMBH·Filed 2020·Granted Mar 28, 2023·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →