Inventor · disambiguated record

Haili Jia

Also filed as: Jia haili

1 granted patent·0 citations·filing 2015–2015

7Inventor score

Technology areasG03F

Files withSHANGHAI MICROELECTRONICS EQUI1

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1 record

0131US9760022B2Lithography machine workpiece table and vertical position initialization method thereofSHANGHAI MICROELECTRONICS EQUI·Filed 2015·Granted Sep 12, 2017·0 cites·13 claims

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