Inventor · disambiguated record
Rubin Ye
Also filed as: YE RUBIN
4 granted patents·4 pending applications·6 citations·filing 2016–2023
61Inventor score
Files withADVANCED MICRO FABRICATION EQUIPMENT INC CHINA7ADVANCED MICRO FABRICATION EQUIPMENT INC SHANGHAI1
Top patents by PatentIndex Score
8 records- 0185US10593520B2Temperature adjusting apparatus and method for a focus ringADVANCED MICRO FABRICATION EQUIPMENT INC SHANGHAI·Filed 2016·Granted Mar 17, 2020·5 cites·9 claims
- 0273US2024071724A1Method and device for matching impedance of pulse radio frequency plasmaADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2023·Application pending·0 cites
- 0366US11626314B2Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is locatedADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Apr 11, 2023·1 cites·10 claims
- 0457US2020185196A1Method and device for matching impedance of pulse radio frequency plasmaADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Application pending·0 cites
- 0551US2025316456A1Plasma treatment device, shower head and manufacturing method thereforADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2023·Application pending·0 cites
- 0650US12087548B2Plasma reactorADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2021·Granted Sep 10, 2024·0 cites·14 claims
- 0746US12494350B2Lower electrode assembly and plasma processing deviceADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2022·Granted Dec 9, 2025·0 cites·17 claims
- 0844US2021118716A1Electrostatic chuck, method of manufacturing electrostatic chuck, and plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →