Inventor · disambiguated record
Hiroaki Oizumi
Also filed as: OIZUMI HIROAKI
12 granted patents·2 pending applications·167 citations·filing 1988–2020
90Inventor score
Files withHITACHI LTD8GIGAPHOTON INC2HITACHI HIGH TECH CORP1OIZUMI HIROAKI1RENESAS ELECTRONICS CORP1
Top patents by PatentIndex Score
14 records- 0184US5372916AX-ray exposure method with an X-ray mask comprising phase shifter sidewallsHITACHI LTD·Filed 1992·Granted Dec 13, 1994·44 cites·9 claims
- 0281US5305364AProjection type X-ray lithography apparatusHITACHI LTD·Filed 1992·Granted Apr 19, 1994·38 cites·19 claims
- 0372US5485497AOptical element and projection exposure apparatus employing the sameHITACHI LTD·Filed 1994·Granted Jan 16, 1996·25 cites·24 claims
- 0462US5272744AReflection maskHITACHI LTD·Filed 1992·Granted Dec 21, 1993·33 cites·16 claims
- 0561US5017458AMethod for production of graft copolymer, pattern replication method, and base polymer and resist for graft copolymerizationHITACHI LTD·Filed 1989·Granted May 21, 1991·13 cites·9 claims
- 0652US12072507B2Laser radiation systemGIGAPHOTON INC·Filed 2020·Granted Aug 27, 2024·0 cites·19 claims
- 0750US2016170309A1Light exposure method, and light exposure apparatusRENESAS ELECTRONICS CORP·Filed 2016·Application pending·0 cites
- 0846US6613497B1Light exposure methodSONY CORP·Filed 2000·Granted Sep 2, 2003·1 cites·8 claims
- 0945US9291919B2Light exposure method, and light exposure apparatusOIZUMI HIROAKI·Filed 2011·Granted Mar 22, 2016·0 cites·15 claims
- 1044US11710660B2Laser irradiation method and laser irradiation systemGIGAPHOTON INC·Filed 2020·Granted Jul 25, 2023·0 cites·5 claims
- 1139US2014220489A1Method for processing sample and sample processing apparatusHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
- 1238US4960676AMethod for forming pattern by using graft copolymerizationHITACHI LTD·Filed 1988·Granted Oct 2, 1990·7 cites·2 claims
- 1338US4954424APattern fabrication by radiation-induced graft copolymerizationHITACHI LTD·Filed 1988·Granted Sep 4, 1990·4 cites·13 claims
- 1432US5177773AX-ray mask and method for producing sameHITACHI LTD·Filed 1991·Granted Jan 5, 1993·2 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →