Inventor · disambiguated record
Glenn M. Tom
Also filed as: TOM GLENN · TOM GLENN M · TOM GLENN MCPHERSON
103 granted patents·29 pending applications·6,365 citations·filing 1983–2023
99Inventor score
Top patents by PatentIndex Score
132 records- 0199US6089027AFluid storage and dispensing systemADVANCED TECH MATERIALS·Filed 1999·Granted Jul 18, 2000·216 cites·43 claims
- 0299US5518528AStorage and delivery system for gaseous hydride, halide, and organometallic group V compoundsADVANCED TECH MATERIALS·Filed 1994·Granted May 21, 1996·289 cites·62 claims
- 0399US4661575ADicyclopentadiene polymer productHERCULES INC·Filed 1986·Granted Apr 28, 1987·296 cites·1 claims
- 0498US6749671B2Abatement of effluents from chemical vapor deposition processes using organometallic source reagentsADVANCED TECH MATERIALS·Filed 2003·Granted Jun 15, 2004·395 cites·20 claims
- 0598US6500487B1Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutionsADVANCED TECH MATERIALS·Filed 1999·Granted Dec 31, 2002·417 cites·61 claims
- 0698US6406519B1Gas cabinet assembly comprising sorbent-based gas storage and delivery systemADVANCED TECH MATERIALS·Filed 2000·Granted Jun 18, 2002·96 cites·66 claims
- 0798US6101816AFluid storage and dispensing systemADVANCED TECH MATERIALS·Filed 1998·Granted Aug 15, 2000·157 cites·75 claims
- 0897US6343476B1Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ thereinADVANCED TECH MATERIALS·Filed 2000·Granted Feb 5, 2002·94 cites·20 claims
- 0997US5993766AGas source and dispensing systemADVANCED TECH MATERIALS·Filed 1997·Granted Nov 30, 1999·156 cites·19 claims
- 1097US5704965AFluid storage and delivery system utilizing carbon sorbent mediumADVANCED TECH MATERIALS·Filed 1996·Granted Jan 6, 1998·180 cites·50 claims
- 1197US4853148AProcess and composition for drying of gaseous hydrogen halidesADVANCED TECH MATERIALS·Filed 1987·Granted Aug 1, 1989·60 cites·9 claims
- 1296US6833024B2Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutionsADANCED TECHNOLOGY MATERIALS I·Filed 2002·Granted Dec 21, 2004·383 cites·13 claims
- 1396US6132492ASorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sameADVANCED TECH MATERIALS·Filed 1998·Granted Oct 17, 2000·150 cites·40 claims
- 1496US5151395ABulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition thereforNOVAPURE CORP·Filed 1990·Granted Sep 29, 1992·120 cites·11 claims
- 1596US4723967AValve block and container for semiconductor source reagent dispensing and/or purificationADVANCED TECH MATERIALS·Filed 1987·Granted Feb 9, 1988·114 cites·21 claims
- 1695US6660063B2Sorbent-based gas storage and delivery systemADVANCED TECH MATERIALS·Filed 2002·Granted Dec 9, 2003·85 cites·36 claims
- 1795US6620256B1Non-plasma in-situ cleaning of processing chambers using static flow methodsADVANCED TECH MATERIALS·Filed 2000·Granted Sep 16, 2003·80 cites·20 claims
- 1895US6360546B1Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensingADVANCED TECH MATERIALS·Filed 2000·Granted Mar 26, 2002·69 cites·36 claims
- 1995US5707424AProcess system with integrated gas storage and delivery unitADVANCED TECH MATERIALS·Filed 1996·Granted Jan 13, 1998·134 cites·25 claims
- 2095US5704967AFluid storage and delivery system comprising high work capacity physical sorbentADVANCED TECH MATERIALS·Filed 1996·Granted Jan 6, 1998·128 cites·26 claims
- 2195US4761395AProcess and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impurities therefromADVANCED TECH MATERIALS·Filed 1987·Granted Aug 2, 1988·72 cites·19 claims
- 2294US9211993B2Nested blow molded liner and overpack and methods of making sameTOM GLENN·Filed 2011·Granted Dec 15, 2015·26 cites·17 claims
- 2394US5385689AProcess and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefromNOVAPURE CORP·Filed 1993·Granted Jan 31, 1995·65 cites·15 claims
- 2494US4738693AValve block and container for semiconductor source reagent dispensing and/or purificationADVANCED TECH MATERIALS·Filed 1987·Granted Apr 19, 1988·99 cites·21 claims
- 2593US9073028B2Liner-based liquid storage and dispensing systems with empty detection capabilityADVANCED TECH MATERIALS·Filed 2012·Granted Jul 7, 2015·18 cites·20 claims
- 2693US5622682AMethod for concentration and recovery of halocarbons from effluent gas streamsATMI ECOSYS CORP·Filed 1995·Granted Apr 22, 1997·53 cites·16 claims
- 2793US4603148AMacroreticulate polymer scavengers for the removal of impurities from inert fluidsHERCULES INC·Filed 1984·Granted Jul 29, 1986·61 cites·12 claims
- 2892US9079758B2Fluid storage and dispensing systems and processesO'DOUGHERTY KEVIN T·Filed 2011·Granted Jul 14, 2015·12 cites·26 claims
- 2992US8322571B2Liner-based liquid storage and dispensing systems with empty detection capabilityHOVINEN MINNA·Filed 2006·Granted Dec 4, 2012·39 cites·9 claims
- 3092US6156578AQuartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas streamADVANCED TECH MATERIALS·Filed 1998·Granted Dec 5, 2000·80 cites·47 claims
- 3192US6030591AProcess for removing and recovering halocarbons from effluent process streamsATMI ECOSYS CORP·Filed 1998·Granted Feb 29, 2000·86 cites·16 claims
- 3292US5917140ASorbent-based fluid storage and dispensing vessel with enhanced heat transfer meansADVANCED TECH MATERIALS·Filed 1997·Granted Jun 29, 1999·99 cites·13 claims
- 3392US5037624AComposition, apparatus, and process, for sorption of gaseous compounds of group II-VII elementsADVANCED TECH MATERIALS·Filed 1989·Granted Aug 6, 1991·60 cites·23 claims
- 3491US6295861B1Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising sameADVANCED TECH MATERIALS·Filed 1999·Granted Oct 2, 2001·106 cites·17 claims
- 3591US5779998AMethod and apparatus for concentration and recovery of halocarbons from effluent gas streamsATMI ECOSYS CORP·Filed 1996·Granted Jul 14, 1998·41 cites·9 claims
- 3690US5935305AStorage and delivery system for gaseous compoundsADVANCED TECH MATERIALS·Filed 1995·Granted Aug 10, 1999·94 cites·6 claims
- 3790US5914091APoint-of-use catalytic oxidation apparatus and method for treatment of voc-containing gas streamsATMI ECOSYS CORP·Filed 1996·Granted Jun 22, 1999·95 cites·29 claims
- 3890US5325705AIn-line detector system for real-time determination of impurity concentration in a flowing gas streamNOVAPURE CORP·Filed 1992·Granted Jul 5, 1994·80 cites·13 claims
- 3990US4584425ACycloolefin purification method and polymerization compositionHERCULES INC·Filed 1984·Granted Apr 22, 1986·42 cites·4 claims
- 4089US8336734B2Liquid dispensing systems encompassing gas removalWARE DONALD D·Filed 2007·Granted Dec 25, 2012·30 cites·28 claims
- 4189US6764755B2Channelized sorbent media, and methods of making sameADVANCED TECH MATERIALS·Filed 2001·Granted Jul 20, 2004·37 cites·33 claims
- 4289US6540819B2Gas cabinet assembly comprising sorbent-based gas storage and delivery systemADVANCED TECH MATERIALS·Filed 2001·Granted Apr 1, 2003·41 cites·20 claims
- 4389US6029500APiezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing sameADVANCED TECH MATERIALS·Filed 1998·Granted Feb 29, 2000·87 cites·36 claims
- 4489US4925646AProcess and composition for drying of gaseous hydrogen halidesADVANCED TECH MATERIALS·Filed 1989·Granted May 15, 1990·46 cites·15 claims
- 4589US4604270AScavengers for the removal of impurities from inert fluidsHERCULES INC·Filed 1985·Granted Aug 5, 1986·52 cites·13 claims
- 4688US9650169B2Nested blow molded liner and overpack and methods of making sameENTEGRIS INC·Filed 2015·Granted May 16, 2017·9 cites·13 claims
- 4787US4748216APurified cycloolefin polymerization compositionHERCULES INC·Filed 1987·Granted May 31, 1988·35 cites·6 claims
- 4886US9802808B2Fluid storage and dispensing systems and processesENTEGRIS INC·Filed 2015·Granted Oct 31, 2017·5 cites·7 claims
- 4986US6735978B1Treatment of supercritical fluid utilized in semiconductor manufacturing applicationsADVANCED TECH MATERIALS·Filed 2003·Granted May 18, 2004·31 cites·94 claims
- 5086US4659552AScavengers for the removal of impurities from arsine and phosphineHERCULES INC·Filed 1986·Granted Apr 21, 1987·36 cites·3 claims
Showing the top 50 of 132 patent records by PatentIndex Score.
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