Inventor · disambiguated record
Morteza Farnia
Also filed as: FARNIA MORTEZA
2 granted patents·3 pending applications·38 citations·filing 2001–2010
62Inventor score
Top patents by PatentIndex Score
5 records- 0190US6818783B2Volatile precursors for deposition of metals and metal-containing filmsAIR PROD & CHEM·Filed 2002·Granted Nov 16, 2004·31 cites·36 claims
- 0271US6838573B1Copper CVD precursors with enhanced adhesion propertiesAIR PROD & CHEM·Filed 2004·Granted Jan 4, 2005·7 cites·20 claims
- 0349US2010139554A1Methods and apparatus for making gallium nitride and gallium aluminum nitride thin filmsAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 0438US2002013487A1Volatile precursors for deposition of metals and metal-containing filmsFiled 2001·Application pending·0 cites
- 0537US2010192773A1Abatement apparatus with scrubber conduitAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
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