Inventor · disambiguated record
Liang-Yun Chen
Also filed as: CHEN LIANG-YUN
1 granted patent·1 pending application·3 citations·filing 2006–2012
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2 records- 0166US7344432B2Conductive pad with ion exchange membrane for electrochemical mechanical polishingAPPLIED MATERIALS INC·Filed 2006·Granted Mar 18, 2008·3 cites·30 claims
- 0233US2012227667A1Substrate carrier with multiple emissivity coefficients for thin film processingHUANG JUNO YU-TING·Filed 2012·Application pending·0 cites
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