Inventor · disambiguated record
Shunji Maeda
Also filed as: MAEDA SHUNJI
170 granted patents·36 pending applications·4,397 citations·filing 1985–2021
99Inventor score
Top patents by PatentIndex Score
206 records- 0199US6172363B1Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 1997·Granted Jan 9, 2001·185 cites·20 claims
- 0298US7388979B2Method and apparatus for inspecting pattern defectsHITACHI HIGH TECH CORP·Filed 2004·Granted Jun 17, 2008·136 cites·22 claims
- 0398US6621571B1Method and apparatus for inspecting defects in a patterned specimenHITACHI LTD·Filed 2000·Granted Sep 16, 2003·149 cites·30 claims
- 0497US7664608B2Defect inspection method and apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 16, 2010·37 cites·26 claims
- 0597US7528942B2Method and apparatus for detecting defectsHITACHI HIGH TECH CORP·Filed 2006·Granted May 5, 2009·32 cites·8 claims
- 0697US7465935B2Method for inspecting pattern defect and device for realizing the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 16, 2008·45 cites·8 claims
- 0797US7333192B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 19, 2008·37 cites·20 claims
- 0897US6329826B1Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2000·Granted Dec 11, 2001·95 cites·4 claims
- 0997US5774222AManufacturing method of semiconductor substrative and method and apparatus for inspecting defects of patterns on an object to be inspectedHITACHI LTD·Filed 1995·Granted Jun 30, 1998·167 cites·38 claims
- 1096US7474394B2Apparatus of inspecting defect in semiconductor and method of the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 6, 2009·27 cites·13 claims
- 1196US7417444B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2005·Granted Aug 26, 2008·25 cites·7 claims
- 1296US6556290B2Defect inspection method and apparatus thereforHITACHI LTD·Filed 2001·Granted Apr 29, 2003·75 cites·38 claims
- 1395US8228494B2Apparatus for inspecting defectsSHIBATA YUKIHIRO·Filed 2011·Granted Jul 24, 2012·13 cites·11 claims
- 1495US8005292B2Method and apparatus for inspecting pattern defectsHITACHI HIGH TECH CORP·Filed 2010·Granted Aug 23, 2011·17 cites·10 claims
- 1595US7714997B2Apparatus for inspecting defectsHITACHI HIGH TECH CORP·Filed 2007·Granted May 11, 2010·22 cites·15 claims
- 1695US7400393B2Method and apparatus for detecting defects in a specimen utilizing information concerning the specimenHITACHI HIGH TECH CORP·Filed 2006·Granted Jul 15, 2008·28 cites·7 claims
- 1795US7127126B2Image alignment method, comparative inspection method, and comparative inspection device for comparative inspectionsHITACHI LTD·Filed 2005·Granted Oct 24, 2006·29 cites·14 claims
- 1895US6400454B1Apparatus and method for inspector defectsHITACHI LTD·Filed 2000·Granted Jun 4, 2002·67 cites·20 claims
- 1994US9483049B2Anomaly detection and diagnosis/prognosis method, anomaly detection and diagnosis/prognosis system, and anomaly detection and diagnosis/prognosis programMAEDA SHUNJI·Filed 2010·Granted Nov 1, 2016·28 cites·23 claims
- 2094US7274813B2Defect inspection method and apparatusHITACHI LTD·Filed 2005·Granted Sep 25, 2007·18 cites·24 claims
- 2194US6799130B2Inspection method and its apparatus, inspection systemHITACHI LTD·Filed 2002·Granted Sep 28, 2004·56 cites·26 claims
- 2294US6690469B1Method and apparatus for observing and inspecting defectsHITACHI LTD·Filed 1999·Granted Feb 10, 2004·98 cites·35 claims
- 2393US9933338B2Health management system, fault diagnosis system, health management method, and fault diagnosis methodHITACHI POWER SOLUTIONS CO LTD·Filed 2014·Granted Apr 3, 2018·38 cites·10 claims
- 2493US8682824B2Method and device for monitoring the state of a facilitySHIBUYA HISAE·Filed 2010·Granted Mar 25, 2014·18 cites·21 claims
- 2593US8275190B2Method and apparatus for inspecting pattern defectsSAKAI KAORU·Filed 2011·Granted Sep 25, 2012·13 cites·10 claims
- 2693US8107717B2Defect inspection method and apparatusMAEDA SHUNJI·Filed 2011·Granted Jan 31, 2012·14 cites·16 claims
- 2793US8004666B2Apparatus for inspecting defectsHITACHI HIGH TECH CORP·Filed 2010·Granted Aug 23, 2011·10 cites·14 claims
- 2893US7751036B2Apparatus of inspecting defect in semiconductor and method of the sameHITACHI HIGH TECH CORP·Filed 2009·Granted Jul 6, 2010·14 cites·10 claims
- 2993US6900888B2Method and apparatus for inspecting a pattern formed on a substrateHITACHI HIGH TECH CORP·Filed 2003·Granted May 31, 2005·38 cites·23 claims
- 3093US6762831B2Method and apparatus for inspecting defectsHITACHI LTD·Filed 2002·Granted Jul 13, 2004·45 cites·12 claims
- 3193US6404498B1Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspectedHITACHI LTD·Filed 2000·Granted Jun 11, 2002·38 cites·26 claims
- 3293USD351469SPortable automatic blood glucose analyzerDAIKIN IND LTD·Filed 1992·Granted Oct 11, 1994·61 cites·1 claims
- 3392US8310665B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2012·Granted Nov 13, 2012·9 cites·18 claims
- 3492US8144337B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2009·Granted Mar 27, 2012·15 cites·15 claims
- 3592US7851753B2Method and apparatus for reviewing defectsHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 14, 2010·20 cites·15 claims
- 3692US7792352B2Method and apparatus for inspecting pattern defectsHITACHI HIGH TECH CORP·Filed 2008·Granted Sep 7, 2010·17 cites·29 claims
- 3792US6753972B1Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the sameHITACHI LTD·Filed 1999·Granted Jun 22, 2004·87 cites·22 claims
- 3892US6587581B1Visual inspection method and apparatus thereforHITACHI LTD·Filed 1998·Granted Jul 1, 2003·118 cites·59 claims
- 3991US8630962B2Error detection method and its system for early detection of errors in a planar or facilitiesMAEDA SHUNJI·Filed 2009·Granted Jan 14, 2014·27 cites·14 claims
- 4091US7768635B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 3, 2010·10 cites·20 claims
- 4191US7359044B2Method and apparatus for inspecting pattern defectsHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 15, 2008·17 cites·23 claims
- 4291US7330248B2Method and apparatus for inspecting defectsHITACHI LTD·Filed 2005·Granted Feb 12, 2008·15 cites·15 claims
- 4391US7231079B2Method and system for inspecting electronic circuit patternHITACHI LTD·Filed 2002·Granted Jun 12, 2007·44 cites·27 claims
- 4491US6947587B1Defect inspection method and apparatusHITACHI LTD·Filed 1999·Granted Sep 20, 2005·88 cites·30 claims
- 4591US6456951B1Method and apparatus for processing inspection dataHITACHI LTD·Filed 2000·Granted Sep 24, 2002·58 cites·27 claims
- 4690US8634069B2Defect inspection device and defect inspection methodNAKANO HIROYUKI·Filed 2009·Granted Jan 21, 2014·16 cites·15 claims
- 4790US8218138B2Apparatus and method for inspecting defectsNAKANO HIROYUKI·Filed 2011·Granted Jul 10, 2012·7 cites·11 claims
- 4890US8103087B2Fault inspection methodMAEDA SHUNJI·Filed 2007·Granted Jan 24, 2012·19 cites·34 claims
- 4990US7952074B2Method and apparatus for inspecting integrated circuit patternHITACHI LTD·Filed 2008·Granted May 31, 2011·8 cites·18 claims
- 5090US7848563B2Method and apparatus for inspecting a defect of a patternHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 7, 2010·18 cites·14 claims
Showing the top 50 of 206 patent records by PatentIndex Score.
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