Inventor · disambiguated record
Greg Blackburn
Also filed as: BLACKBURN GREG · BLACKBURN GREG A · BLACKBURN GREG ALLEN
9 granted patents·171 citations·filing 1993–2020
88Inventor score
Top patents by PatentIndex Score
9 records- 0189US5474649APlasma processing apparatus employing a textured focus ringAPPLIED MATERIALS INC·Filed 1994·Granted Dec 12, 1995·99 cites·12 claims
- 0287US10770321B2Process kit erosion and service life predictionAPPLIED MATERIALS INC·Filed 2019·Granted Sep 8, 2020·4 cites·17 claims
- 0386US10177018B2Process kit erosion and service life predictionAPPLIED MATERIALS INC·Filed 2017·Granted Jan 8, 2019·4 cites·17 claims
- 0466US5693179AContaminant reduction improvements for plasma etch chambersAPPLIED MATERIALS INC·Filed 1995·Granted Dec 2, 1997·18 cites·30 claims
- 0562US5484486AQuick release process kitAPPLIED MATERIALS INC·Filed 1994·Granted Jan 16, 1996·23 cites·27 claims
- 0659US11450976B2Ground bar and method of groundingBLACKBURN GREG ALLEN·Filed 2020·Granted Sep 20, 2022·0 cites·16 claims
- 0743US5480052ADomed extension for process chamber electrodeAPPLIED MATERIALS INC·Filed 1993·Granted Jan 2, 1996·12 cites·18 claims
- 0841USD904306SGround barBLACKBURN GREG ALLEN·Filed 2019·Granted Dec 8, 2020·3 cites·1 claims
- 0939US5716484AContaminant reduction improvements for plasma etch chambersAPPLIED MATERIALS INC·Filed 1995·Granted Feb 10, 1998·8 cites·19 claims
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