Inventor · disambiguated record
Yutaka Yamahira
Also filed as: YAMAHIRA YUTAKA
3 granted patents·135 citations·filing 1990–1998
76Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0176US5498294AApparatus and method for washing substratesTOKYO ELECTRON LTD·Filed 1993·Granted Mar 12, 1996·68 cites·10 claims
- 0270US5035200AProcessing liquid supply unitTOKYO ELECTRON LTD·Filed 1990·Granted Jul 30, 1991·51 cites·12 claims
- 0346US6311091B1Substitute processing apparatus with power distribution control for reduced power consumption during apparatus start upTOKYO ELECTRON LTD·Filed 1998·Granted Oct 30, 2001·16 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →