Inventor · disambiguated record
Natalia V. Doubina
Also filed as: DOUBINA NATALIA · DOUBINA NATALIA V
5 granted patents·3 pending applications·35 citations·filing 2007–2021
76Inventor score
Top patents by PatentIndex Score
8 records- 0192US9865501B2Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layerLAM RES CORP·Filed 2013·Granted Jan 9, 2018·6 cites·19 claims
- 0290US7799684B1Two step process for uniform across wafer deposition and void free filling on ruthenium coated wafersNOVELLUS SYSTEMS INC·Filed 2007·Granted Sep 21, 2010·22 cites·40 claims
- 0382US9777386B2Chemistry additives and process for cobalt film electrodepositionLAM RES CORP·Filed 2015·Granted Oct 3, 2017·5 cites·22 claims
- 0473US10329683B2Process for optimizing cobalt electrofill using sacrificial oxidantsLAM RES CORP·Filed 2016·Granted Jun 25, 2019·2 cites·9 claims
- 0553US11078591B2Process for optimizing cobalt electrofill using sacrificial oxidantsLAM RES CORP·Filed 2019·Granted Aug 3, 2021·0 cites·11 claims
- 0650US2018350670A1Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layerLAM RES CORP·Filed 2017·Application pending·0 cites
- 0747US2023178430A1Electroplating cobalt, nickel, and alloys thereofLAM RES CORP·Filed 2021·Application pending·0 cites
- 0841US2015299886A1Method and apparatus for preparing a substrate with a semi-noble metal layerLAM RES CORP·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →