Inventor · disambiguated record
Viacheslav Medvedev
Also filed as: MEDVEDEV VIACHESLAV
4 granted patents·2 pending applications·4 citations·filing 2010–2019
58Inventor score
Files withASML NETHERLANDS BV2YAKUNIN ANDREI MIKHAILOVICH2KRIVTSUN VLADIMIR MIHAILOVITCH1ZEISS CARL SMT GMBH1
Top patents by PatentIndex Score
6 records- 0176US9411238B2Source-collector device, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Aug 9, 2016·4 cites·8 claims
- 0247US10916356B2Reflective optical elementZEISS CARL SMT GMBH·Filed 2019·Granted Feb 9, 2021·0 cites·15 claims
- 0339US9007565B2Spectral purity filterYAKUNIN ANDREI MIKHAILOVICH·Filed 2010·Granted Apr 14, 2015·0 cites·17 claims
- 0438US9366967B2Radiation sourceYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Jun 14, 2016·0 cites·13 claims
- 0537US2013010275A1Lithographic apparatus and spectral purity filterASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
- 0629US2012229785A1Multilayer mirror, lithograpic apparatus, and methods for manufacturing a multilayer mirror and a productKRIVTSUN VLADIMIR MIHAILOVITCH·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →